04023562 is referenced by 144 patents and cites 6 patents.

A fluidtight, hermetically sealed, miniature transducer adapted to be inserted into the human body and useful for directly monitoring internal fluid or pneumatic pressures within the human body is disclosed. Semiconductor strain gauge elements constituting a piezoresistive bridge are formed by diffusion on the surface of one side of an integral flexible, rectangular, silicon diaphragm area of a single crystal silicon base. A single crystal silicon cover is eutectically bonded to the base by a metallic laminate seal. The base, cover, and seal define an evacuated fluidtight chamber containing the strain gauge elements. Electrical conductors, which include diffused conductor paths under an insulating oxide layer, extend from the piezoresistive bridge to contact pads outside the fluidtight chamber. The contact pads can be connected to a readout device for electrically measuring the pressure differential between the evacuated chamber and fluid external to the transducer as a function of time.

Title
Miniature pressure transducer for medical use and assembly method
Application Number
5/609382
Publication Number
4023562
Application Date
September 2, 1975
Publication Date
May 17, 1977
Inventor
Eugene T Yon
Lyndhurst
OH, US
Wen H Ko
Cleveland Heights
OH, US
Jaroslav Hynecek
Bedford
OH, US
Agent
McNenny Pearne Gordon Gail Dickinson & Schiller
Assignee
Case Western Reserve University
OH, US
IPC
A61B 5/02
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