04008619 is referenced by 177 patents and cites 5 patents.

Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction characteristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.

Title
Vacuum monitoring
Application Number
5/632460
Publication Number
4008619
Application Date
November 17, 1975
Publication Date
February 22, 1977
Inventor
James H Ewing
Brockton
MA, US
H David Alcaide
Bedford
MA, US
Agent
James E Mrose
Assignee
MKS Instruments
MA, US
IPC
G01N 27/04
G01L 9/12
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