A method and a device for prefixing substrates, whereby at least one substrate surface of the substrates is amorphized in at least one surface area, characterized in that the substrates are aligned and then make contact and are prefixed on the amorphized surface areas.

Title
METHOD FOR PREFIXING OF SUBSTRATES
Application Number
16/294235
Publication Number
20190198362 (A1)
Application Date
March 6, 2019
Publication Date
June 27, 2019
Assignee
EV Group E Thallner
AT
IPC
H01L 21/20
H01L 21/02
H01L 21/68
H01L 21/3205
H01L 21/67
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