A method includes forming at least one shallow trench isolation structure in a substrate to isolate adjacent different type devices. The method further includes forming a barrier trench structure in the substrate to isolate diffusions of adjacent same type devices. The method further includes spanning the barrier trench structure with material to connect the diffusions of the adjacent same type device, on a same level as the adjacent same type devices.

Title
BARRIER TRENCH STRUCTURE AND METHODS OF MANUFACTURE
Application Number
14/686972
Publication Number
20150221646 (A1)
Application Date
April 15, 2015
Publication Date
August 6, 2015
IPC
H01L 29/06
H01L 27/092
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