This invention relates to an integrated vapor or liquid phase reagent dispensing apparatus having a plurality of vessels and a plurality of carrier or inert gas feed/vapor or liquid phase reagent delivery manifolds, that may be used for continuously dispensing vapor or liquid phase reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

Title
Multiple ampoule delivery systems
Application Number
12/369799
Publication Number
20090211525
Application Date
February 12, 2009
Publication Date
August 27, 2009
Inventor
Ronald Spohn
Getzville
NY, US
Stephen Chesters
Allen
TX, US
Edward Pryor
San Antonio
TX, US
Michael Joseph Krause
Orchard Park
NY, US
Cynthia A Hoover
Grand Island
NY, US
Demetrius Sarigiannis
Grand Island
NY, US
Agent
Law Department M1 557
CT, US
Praxair
CT, US
IPC
G05D 07/00
C23C 16/448
C23C 16/54
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