A carrier substrate is provided with a layer of PDMS and curing agent on one side of the carrier substrate. The PDMS and curing agent can be arranged to receive and adhere to a lithographic substrate. The carrier substrate can be dimensioned such that the combined carrier substrate and lithographic substrate may be handled by a conventional lithographic apparatus.

Title
Lithographic method and carrier substrate
Application Number
12/276705
Publication Number
20090170025
Application Date
November 24, 2008
Publication Date
July 2, 2009
Inventor
Maria PETER
Erwin Rinaldo MEINDERS
Paulus Wilhelmus Leonardus VAN DIJK
Peter Theodorus Maria GIESEN
Cheng Qun GUI
Wilhelmus Johannes Maria DE LAAT
Agent
Pillsbury Winthrop Shaw Pittman
VA, US
Assignee
Asml Netherlands
IPC
G03F 07/20
G03F 07/04
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