Provided are coaxial waveguide microstructures. The microstructures include a substrate and a coaxial waveguide disposed above the substrate. The coaxial waveguide includes: a center conductor; an outer conductor including one or more walls, spaced apart from and disposed around the center conductor; one or more dielectric support members for supporting the center conductor in contact with the center conductor and enclosed within the outer conductor; and a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state. Also provided are methods of forming coaxial waveguide microstructures by a sequential build process and hermetic packages which include a coaxial waveguide microstructure.

Title
Coaxial waveguide microstructures having an active and methods of formation thereof
Application Number
12/214785
Publication Number
20090058569
Application Date
June 20, 2008
Publication Date
March 5, 2009
Inventor
John J Fisher
Blacksburg
VA, US
David W Sherrer
Radford
VA, US
Agent
Sherr & Vaughn Pllc
VA, US
Assignee
Rohm and Haas Electronic Materials
MA, US
IPC
H01P 03/06
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