A cell suitable for use with an atomic clock and a method for making the same, the cell including: a silicon wafer having a recess formed therein; at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon sealing the recess; and, an alkali metal containing component and buffer gas contained in the recess. The method includes: providing a silicon wafer; forming a cavity through the silicon wafer; introducing an alkali metal containing component and buffer gas into the cavity; and, anodically bonding at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon to the wafer to close the cavity.

Title
Anodically Bonded Cell, Method for Making Same and Systems Incorporating Same
Application Number
12/121876
Publication Number
20080218281
Application Date
May 16, 2008
Publication Date
September 11, 2008
Inventor
Peter J Zanzucchi
Princeton Junction
NJ, US
Ralph Doud Whaley
Princeton Junction
NJ, US
John P Riganati
Skillman
NJ, US
Sterling Eduard McBride
Princeton
NJ, US
Alan Michael Braun
Lawrenceville
NJ, US
Joseph H Abeles
East Brunswick
NJ, US
Steven Alan Lipp
West Windsor
NJ, US
Agent
Lowenstein Sandler PC
NJ, US
Agent
Patent Docket Administrator
NJ, US
Assignee
Sarnoff Corporation
NJ, US
IPC
H01L 21/30
H03L 07/16
H01S 01/06
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