A cell suitable for use with an atomic clock and a method for making the same, the cell including: a silicon wafer having a recess formed therein; at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon sealing the recess; and, an alkali metal containing component and buffer gas contained in the recess. The method includes: providing a silicon wafer; forming a cavity through the silicon wafer; introducing an alkali metal containing component and buffer gas into the cavity; and, anodically bonding at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon to the wafer to close the cavity.

Title
Anodically bonded cell, method for making same and systems incorporating same
Application Number
11/030009
Publication Number
20050184815
Application Date
January 5, 2005
Publication Date
August 25, 2005
Inventor
Peter J Zanzucchi
Princeton Junction
NJ, US
Ralph Doud Whaley
Princeton Junction
NJ, US
John P Riganati
Skillman
NJ, US
Sterling Eduard McBride
Princeton
NJ, US
Alan Michael Braun
Lawrenceville
NJ, US
Joseph H Abeles
East Brunswick
NJ, US
Steven Alan Lipp
West Windsor
NJ, US
Agent
Plovy & Howard PC
PA, US
IPC
H01J 25/50
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