20030122079-A1 is referenced by 2 patents.

A focal plane array for millimeter wave imaging comprising a three dimensional stack of antenna elements and radiometer microwave monolithic integrated circuits (MMICs) embedded in polymer dielectric layers built on top of a silicon substrate. Each radiometer MMIC and antenna element comprise a radiometer pixel. The silicon substrate contains integrated circuits to collect and process the signals from each radiometer pixel and generate a full-frame video signal. The array can be fabricated on a single silicon wafer or can be constructed from structures fabricated on multiple silicon wafers.

Title
Millimeter wave imaging array
Application Number
10/256335
Publication Number
20030122079
Application Date
September 26, 2002
Publication Date
July 3, 2003
Inventor
Peter D Brewer
Westlake Village
CA, US
Mehran Matloubian
Encino
CA, US
Carl W Pobanz
Rancho Palos Verdes
CA, US
Agent
c o LADAS & PARRY
CA, US
Agent
Ross A Schmitt ESQ
CA, US
IPC
G01T 01/00
H01L 31/00
G02F 01/01
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