An apparatus (10) includes a digital micromirror device (16) disposed within a housing (11) that has an opening (13) hermetically sealed by a lid (17). The lid includes a radiation transmissive window (22) with peripheral edges fixedly coupled by an annular sealing section (23) to a metal frame (21). The sealing section engages a frame surface oxidized in a wet nitrogen furnace. The sealing section melts at a temperature lower than the window or frame. The sealing section includes two center rings (151, 152) made of sealing glass that are respectively bonded to the window and frame and to each other. The sealing section also includes inner and outer rings (152, 157, 158) made of sealing glass and disposed on opposite sides of the center rings to protect the center rings from environmental factors.

Title
Lid with window hermetically sealed to frame, and a method of making it
Application Number
9/880365
Publication Number
20020192403
Application Date
June 13, 2001
Publication Date
December 19, 2002
Inventor
Mark B Hanna
Allen
TX, US
Agent
Baker Botts
TX, US
Agent
Jerry W Mills Esq
TX, US
IPC
B32B 17/00
C03C 29/00
C03B 23/20
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