20020173680-A1 is referenced by 1 patents.

Disclosed are spirocyclic olefin polymers, methods of preparing spirocyclic olefin polymers, photoresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.

Title
Polymer and photoresist compositions
Application Number
10/126634
Publication Number
20020173680
Application Date
April 20, 2002
Publication Date
November 21, 2002
Inventor
Wang Yueh
Shrewsbury
MA, US
Peter Trefonas
Medway
MA, US
George G Barclay
Jefferson
MA, US
Charles R Szmanda
Westborough
MA, US
Agent
Dike Bronstein Roberts & Cushman IP Group
MA, US
Edwards & Angell
MA, US
Assignee
Shipley Company
MA, US
IPC
C07C 35/18
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