20020160302-A1 is referenced by 1 patents.

Disclosed are spirocyclic olefin polymers, methods of preparing spirocyclic olefin polymers, photoresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.

Title
Polymer and photoresist compositions
Application Number
10/126191
Publication Number
20020160302
Application Date
April 20, 2002
Publication Date
October 31, 2002
Inventor
Wang Yueh
Shrewsbury
MA, US
Peter Trefonas
Medway
MA, US
George G Barclay
Jefferson
MA, US
Charles R Szmanda
Westborough
MA, US
Agent
c o EDWARDS & ANGELL
MA, US
Agent
S Matthew Cairns
MA, US
Assignee
Shipley Company
MA, US
IPC
G03F 07/04
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