Disclosed are compositions and methods for providing substantially planarized surfaces in the manufacture of electronic devices. Also disclosed are compositions and methods for protecting apertures in the manufacture of electronic devices.

Title
Aperture fill
Application Number
10/108070
Publication Number
20020110665
Application Date
March 27, 2002
Publication Date
August 15, 2002
Inventor
Edward K Pavelchek
Stow
MA, US
Peter Trefonas
Medway
MA, US
Edward W Rutter
Franklin
MA, US
Agent
c o Dike Bronstein Roberts & Cushman
MA, US
Agent
S Matthew Cairns
MA, US
Assignee
Shipley Company
MA, US
IPC
B32B 03/10
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