20020003917-A1 is referenced by 1 patents.

An optical fiber pressure sensor having a base layer 20 with an optical fiber hole, a fiber stop layer 28 and, optionally, an etch stop layer 24. The fiber stop layer optionally has a fiber stop hole 33 that is smaller than the optical fiber 22. A diaphragm cap layer 32 is bonded to the fiber stop layer 28. The diaphragm cap layer 32 has a diaphragm 34 spaced apart from the optical fiber. The optical fiber and diaphragm form an Etalon that changes cavity length with applied pressure. Optionally, the device is made almost entirely of silicon, and so has reduced mechanical stress problems caused by thermal expansion mismatches. This allows the present sensor to be used in high temperature environments such as internal combustion engines.

Title
Micromachined, etalon-based optical fiber pressure sensor
Application Number
9/814526
Publication Number
20020003917
Application Date
March 22, 2001
Publication Date
January 10, 2002
Inventor
Dan A Steinberg
Blacksburg
VA, US
Don E Leber
Shawsville
VA, US
David W Sherrer
Blacksburg
VA, US
Agent
Haleos
VA, US
IPC
G01L 11/02
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