Title
Apparatus for treating thin film and method of treating thin film
Application Number
094128525
Publication Number
200607884
Application Date
August 19, 2005
Publication Date
March 1, 2006
Inventor
Park Sang Hyuck
Eom Soung Yeoul
Lee Jong Chul
Assignee
LG Electronics
Lg Philips Lcd
IPC
C23C 016/513