Title
Metal gate integration structure and method including metal fuse, anti-fuse and/or resistor
Application Number
098115438
Publication Number
201007824
Application Date
May 8, 2009
Publication Date
February 16, 2010
Inventor
Ho Herbert Lei
He Zhong Xiang
Gebreselasie Ephrem G
Eshun Ebenezer E
Coolbaugh Douglas D
Assignee
International Business Machines Corporationus
IPC
H01L 21/28|H01L 27/06|H01L 21/8234