Title
System and method for moving an object employing piezo actuators
Application Number
2004072567
Publication Number
112962
Application Date
December 8, 2004
Publication Date
December 31, 2007
Inventor
Leenheers Gerardus Jacobus Cornelis Catharina Maria
Mattaar Thomas Augustus
Hendriks Stefan Gertrud Marie
Agent
PATRICK MIRANDAH CO
Assignee
Asml Netherlands
IPC
G03F 07/20
H01L 41/08