PROBLEM TO BE SOLVED: To solve the problem wherein a successive requirement to a new method for preparing an ultra-pure organometallic compound to be used for a CVD precursor is present.SOLUTION: The method of preparing an ultra-pure organometallic compound comprises using a microchannel device for synthesis in reacting a metal halide with an alkylating agent to produce the ultra-pure alkylmetal compound for processes such as chemical vapor deposition.

Title
Method for preparing organometallic compound
Application Number
2008-176566
Publication Number
2009-035539
Application Date
July 7, 2008
Publication Date
February 19, 2009
Inventor
Ware Robert A
Shenai Khatkhate Deodatta V
Maroldo Stephen G
Lipiecki Francis Joseph
Assignee
Rohm &Amp Haas Co
IPC
C07F 07/30
C07F 05/06