PROBLEM TO BE SOLVED: To provide an optical channel system for an optical fiber included in an ion/electron beam tool for imaging or processing an integrated circuit, or for executing both.SOLUTION: This optical channel system includes an image collecting portion, an optical fiber image transmitting portion, and a detecting portion. The image collection portion includes a micro-optical component, has dimensions that is smaller than millimeter, and is thereby stored easily within operating distance of the ion/electron beam tool.

Non-destructive navigation for integrated circuit, and high-resolution optical channel for processing
Application Number
Publication Number
Application Date
May 22, 2007
Publication Date
December 6, 2007
Narender Rana
Michael Renner
Rue Chad
Steven Brett Herschbein
Herschel M Marchman
Internatl Business Mach Corp &Lt IBM&Gt
H01L 21/66
G03F 01/08
G01N 21/84