2003-270132 is referenced by 14 patents.

PROBLEM TO BE SOLVED: To solve problems of a conventional localized plasmon resonance sensor using metal particles such that the peak strength of an absorbance spectrum decreases and the width of the spectrum becomes broad due to variations in size of the metal particles and random configuration thereof, and limitation of the sensor's sensitivity due to small changes in a signal for detecting changes in a medium near the metal particles.SOLUTION: The sensor device comprises a metal film having a plurality of openings, a sensor material located in the opening, a light source, and a photodetector detecting light which is transmitted through or reflected by the opening after irradiated from the light source, wherein the openings is periodically located in a first direction of the metal film, and the size and interval of the openings in the direction are not greater than the wavelength of the light. A sensor medium comprises the metal film and the sensor material, wherein the size and interval of the openings which are periodically located in the first direction are not greater than 200 nm. An inspection method uses the sensor device or the sensor medium.

Title
Device and medium of chemical sensor and inspection method using the same
Application Number
2003-004491
Publication Number
2003-270132
Application Date
January 10, 2003
Publication Date
September 25, 2003
Inventor
Yamada Tomohiro
Inao Yasuhisa
Yamaguchi Takako
Mizutani Natsuhiko
Kuroda Akira
Assignee
Canon
IPC
G01N 37/00
G01N 33/53
G01N 33/483
G01N 33/02
G01N 21/75
G01N 21/64
G01N 21/27