2001-085163 is referenced by 7 patents.

PROBLEM TO BE SOLVED: To provide a top light taking type organic electroluminescent element reducing generation of leakage currents and having high reliability by reducing sputtering power during the initial period of deposition when forming a transparent conductive film on an upper cathode through sputtering, and by raising the power thereafter so that deposition by sputtering is made possible within a processing time such that the element can withstand production, for reducing damage to an organic layer on a bed. SOLUTION: The organic layer 10 of this organic electroluminescent element includes a luminescent layer which emits light through the recombination of holes supplied from an anode A with electrons supplied from a cathode K. To manufacture it, an anode formation process for forming the anode A on a substrate 1, an organic-layer formation process for forming the organic layer 10 on the anode A, a cathode formation process for forming on the organic layer 10 the cathode K in a thickness that enables light to pass therethrough, and a transparent conductive deposition process for depositing a transparent conductive film 12 by sputtering to cover the cathode K are effected. In the transparent conductive deposition process, the electric power required for sputtering is set at a low value during the initial period of film formation and is set to become higher as the deposition progresses.

Organic electroluminescent element, its manufacturing method, and display device
Application Number
Publication Number
Application Date
September 20, 1999
Publication Date
March 30, 2001
Hirano Takayuki
Yamada Jiro
Chiba Yasuhiro
H05B 33/28
H05B 33/14
H05B 33/10