2858716-A1 is referenced by 1 patents and cites 3 patents.

The process involves forming a polymer layer (24) on a hybrid circuit to cover one side of a substrate and elementary circuits. The layer is removed from the side of each elementary circuit. Anti-reflect layer (28) is formed on the hybrid circuit to cover the side of each elementary circuit and a part of the former layer. Parts of both layers are removed to locate part of remaining latter layer on the side of each elementary circuit.

Title
Thin layer obtaining process for hybrid circuit, involves forming polymer and anti-reflect layers on circuit, and removing parts of both layers to locate part of remaining latter layer on side of each elementary circuit
Application Number
FR19970014571 19971120
Publication Number
2858716 (A1)
Application Date
November 20, 1997
Publication Date
February 11, 2005
Inventor
Mathieu Lydie
Rambaud Philippe
Marion Francois
Assignee
Commissariat Energie Atomique
FR
IPC
H01L23/31
H01L 23/31
H01L21/56
H01L 21/56
H01L31/0216
H01L 31/0216
H01S5/00
H01S 05/00
H01L23/28
H01L 23/28
H01L21/02
H01L 21/02
H01S5/022
H01S 05/022
H01L23/31
H01L 23/31
H01L21/56
H01L 21/56
View Original Source Download PDF