1281680-A2 is referenced by 4 patents and cites 14 patents.

A method of making fused silica includes generating a plasma, delivering reactants comprising a silica precursor into the plasma to produce silica particles, and depositing the silica particles on a deposition surface to form glass; also a photomask material obtainable by the method is claimed.

Method for making glass by plasma deposition and so obtained photomask material
Application Number
EP20020255384 20020801
Publication Number
1281680 (A2)
Application Date
August 1, 2002
Publication Date
February 5, 2003
Rakotoarison Sylvain
Ball Laura Jane
C03B 19/14
H01L 21/02
C23C 16/50
C23C 16/40
C03C 03/06
C03B 20/00
C03B 19/00
C03B 08/00
G03F 01/14
H01L 21/027
C23C 16/513
C23C 16/40
C03C 03/06
C03B 20/00
C03B 19/14
C03B 19/01
C03B 08/04
G03F 01/14
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