0978832-A2 is referenced by 24 patents and cites 5 patents.

A plurality of data storage media (71) are integrated into a microfabricated data storage system (21). The media (71) are supported by a plurality of flexures (82) that allows the media (71) to move within a plane so that data can be stored at different locations on the media (71). The flexures (82), however, significantly resist any motion of the media (71) out of the plane. Therefore, tips (52) or other devices for writing or reading to or from the media (71) can be placed a small distance from the media (71), thereby facilitating attempts to microfabricate the data storage system (21). After forming the media (71) on a microfabricated wafer (32), the wafer (32) can be bonded to another microfabricated wafer (25), and the resulting structure can thereby be sealed by a gasket (62) in order to seal the media (71) within the data storage system (21).; Preferably the bonding process to join the microfabricated wafers (25, 32) is CMOS (complementary metal-oxide semiconductor) compatible by using elements such as palladium and silicon that bond at relatively low temperatures.

Title
System and method for forming electrostatically actuated data storage mechanisms
Application Number
EP19990105553 19990318
Publication Number
0978832 (A2)
Application Date
March 18, 1999
Publication Date
February 9, 2000
Inventor
Taussig Carl P
US
Merchant Paul P
US
Hoen Storrs
US
Assignee
Hewlett Packard Co
US
IPC
G11B 19/00
G11B 17/00
G11B 09/00
H02N 01/00
G12B 05/00
G11B 33/14
G11B 25/04
G11B 21/02
G11B 19/20
G11B 19/00
G11B 09/00
B81B 03/00
H02N 01/00
G12B 05/00
G11B 33/14
G11B 25/04
G11B 21/02
G11B 19/20
G11B 19/00
G11B 09/14
G11B 09/00
B81B 03/00
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