0871052-A1 is referenced by 50 patents and cites 3 patents.

The microscope has a motorised scanning table (9), for moving an examined object (8) perpendicular to the optical axis of the microscope. A light source array provides simultaneous illumination of the object at a number of points. A light stop array (4) is positioned in the focal plane of the microscope. A CCD photodetector array (11) is positioned behind the stop array. The charge shifting is synchronised with the displacement of the scanning table using a synchronisation device (13).

Title
Confocal microscope with movable scanning table
Application Number
EP19980105816 19980331
Publication Number
0871052 (A1)
Application Date
March 31, 1998
Publication Date
October 14, 1998
Inventor
Scheruebl Thomas Dr
DE
Czarnetzki Norbert
DE
Ott Peter
DE
Derndinger Eberhard
DE
Assignee
Zeiss Stiftung
DE
Zeiss Carl
DE
IPC
G01N 21/89
G02B 21/00
H01L 21/66
H01J 37/28
G02B 21/00
H01J 37/20
H01L 21/66
H01J 37/28
G02B 21/00
H01J 37/20
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