0779436-A2 is referenced by 166 patents and cites 6 patents.

A micromachined pump including a channel formed in a semiconductor substrate by conventional processes such as chemical etching. A number of insulating barriers are established in the substrate parallel to one another and transverse to the channel. The barriers separate a series of electrically conductive strips. An overlying flexible conductive membrane is applied over the channel and conductive strips with an insulating layer separating the conductive strips from the conductive membrane. Application of a sequential voltage to the series of strips pulls the membrane into the channel portion of each successive strip to achieve a pumping action. A particularly desirable arrangement employs a micromachined push-pull dual channel cavity employing two substrates with a single membrane sandwiched between them.

Title
Micromachined peristaltic pump
Application Number
EP19960119593 19961206
Publication Number
0779436 (A2)
Application Date
December 6, 1996
Publication Date
June 18, 1997
Inventor
Hartley Frank T
US
Assignee
Hartley Frank T
US
IPC
F15C 05/00
H02N 01/00
F16K 99/00
F15C 05/00
F04B 43/12
F04B 43/02
H02N 01/00
F16K 99/00
F15C 05/00
F04B 43/12
F04B 43/04
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