0498496-A1 is referenced by 17 patents and cites 3 patents.

A lithographic device with a lithographic irradiation system (1, 13) which is fastened near a lower side to a mounting member (5) of a frame (7). The device is provided with a unit (65) which is formed by a positioning device (37), with which an object table (21) arranged below the irradiation system (1,13) is displaceable, and by a support member (35), over which the object table (21) is guided by means of an aerostatic foot (31). In an operational position, the unit (65) is coupled to a carrier (67) by means of coupling members (73), the carrier (67) being suspended from the mounting member (5) by means of suspension elements (79, 81, 83), so that the unit (65) is arranged between lower frame supports (25) of the frame (7) and a compact construction is obtained.; The unit (65) can be rotated from the operational position to an end position, in which the unit (65) is entirely outside the frame (7) and is easily accessible for maintainance, by means of a rotation mechanism (87) and a swivel mechanism (89). The lithographic device can be used inter alia for irradiating semiconductor substrates, a semiconductor pattern provided on a mask (11) being imaged on a semiconductor substrate (19) provided on the object table (21) by means of the irradiation system (1, 13).

Title
Lithographic device with a suspended object table.
Application Number
EP19920200253 19920129
Publication Number
0498496 (A1)
Application Date
January 29, 1992
Publication Date
August 12, 1992
Inventor
Van Eijk Jan
NL
Van Dijk Cornelis Dionysius
NL
Van Kimmenade Johannes Mathijs
NL
Jacobs Franciscus Mathijs
NL
Franken Dominicus Jacobus
NL
Assignee
Asm Lithography
NL
Philips
NL
IPC
G03F 07/20
H01L 21/02
G03F 09/00
G03F 07/20
F16F 15/04
F16F 15/023
F16F 15/02
H01L 21/30
H01L 21/027
G03F 09/00
G03F 07/20
F16F 15/04
F16F 15/023
F16F 15/02
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