0403254-A2 is referenced by 7 patents and cites 3 patents.

A pressure element having a housing including a flexible membrane receiving portion, a flexible disc member of predetermined shape secured within the housing, and a flexible membrane disposed within the housing, the flexible membrane being substantially more flexible than the disc member, the membrane having an outer portion hermetically secured to the membrane receiving portion, a central portion impinging against the disc member and conforming to the shape thereof and an intermediate unsupported portion joining the interior portion of the outer portion and the exterior portion of the central portion.; The hermetically sealed diaphragm is obtained by providing a diaphragm capable of deforming to a fixed shape, hermetically securing the edge portion of the diaphragm to a securing member, and then forcing a central portion of the diaphragm under sufficient pressure against a surface of predetermined shape and more rigid than the diaphragm to cause the central portion of the diaphragm to conform to the shape of the surface and provide an unwrinkled planar central diaphragm.

Title
Hermetic pressure sensor
Application Number
EP19900306444 19900613
Publication Number
0403254 (A2)
Application Date
June 13, 1990
Publication Date
December 19, 1990
Inventor
Strasser Werner
US
Assignee
Texas Instruments
US
IPC
H01H 35/34
G01L 09/12
G01L 07/08
H01H 35/24
G01L 09/00
G01L 07/02
G01D 11/00
H01H 35/34
G01L 09/00
G01L 07/08
G01D 11/30
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