0347579-A2 is referenced by 50 patents and cites 4 patents.

Micromechanical structure with cavities, containers, openings, channels, recesses, elevations or the like for examinations of sample substances for any changes of physical and/or chemical properties with targeted evaluation and documentation for purposes of biotechnology, genetic engineering, cell research and immune research and other medical, agrarian and environmental research, the structure consisting of or containing semiconducting material (from groups III to VIII of the periodic table of the elements) or of glass or ceramics, diamond or carbon, and having been produced by non-cutting methods, especially by the chemical milling technique.

Title
Device having a specific support structure for receiving, analysing and treating samples.
Application Number
EP19890108748 19890516
Publication Number
0347579 (A2)
Application Date
May 16, 1989
Publication Date
December 27, 1989
Inventor
Hilpert Reinhold Dr
Binder Florian Dr
Deimel Peter Dr
Koniger Max Dr
Dette Eduard
Seidel Helmut Dr
Kroy Walter Dr
Assignee
Messerschmitt Boelkow Blohm
DE
IPC
G01N 27/414
G01N 27/30
G01N 21/03
B01L 03/00
H01L 27/20
G01N 35/00
G01N 27/403
G01N 21/25
B01L 03/00
B01J 19/00
H01L 27/20
G01N 35/00
G01N 27/414
G01N 21/25
B01L 03/00
B01J 19/00
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