0230766-A1 is referenced by 37 patents and cites 2 patents.

A wafer probe comprises a support member having an end region which is shaped to permit the end region to be brought into close proximity with a component under test. An amplifier is mounted on the support member at its end region. A conductive probe element is attached to the amplifier and is electrically connected to the amplifier's input terminal. A transmission line is connected to the amplifier's output terminal for transmitting signals from the amplifier to a measurement instrument.

Title
Wafer probes.
Application Number
EP19860309951 19861219
Publication Number
0230766 (A1)
Application Date
December 19, 1986
Publication Date
August 5, 1987
Inventor
Mccamant Angus J
US
Flegal Robert T
US
Strid Eric W
US
Gleason Reed
US
Assignee
Tektronix
US
IPC
G01R 31/28
G01R 01/067
G01R 01/073
G01R 01/067
G01R 01/02
H01L 21/66
G01R 01/073
G01R 01/067
G01R 01/04
H01L 21/66
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